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SUMIRESIST™ Photoresists

Product name
SUMIRESIST™ Photoresists

IT-related Chemicals

Purposes
IT-related materials
Industrial Chemicals
Electrical & Electronics
Categories
Semiconductor Process Chemicals
Type
Light sensitive resin

Light sensitive resin

Photoresists are photosensitive resins used in the production of high-density, highly integrated circuit patterns on semiconductors and printed boards. Our photoresists respond not only to the needs of latest front-end process but also to the recent sophistication of the back-end process of semiconductor production.
Product reference
NA
Description
Photoresists are photosensitive resins used in the production of high-density, highly integrated circuit patterns on semiconductors and printed boards. Our photoresists respond not only to the needs of latest front-end process but also to the recent sophistication of the back-end process of semiconductor production.

Features (max 5)

Main uses (max 5)

Product line

GradesApplication
I-line resist: PFI / PXi  Series photoresists for all critical and non-critical applications
  • Semiconductor processing
KrF resist: PEK Series photoresists for all critical and non-critical applications
  • Semiconductor processing
ArF resist: PAR Series photoresists (both dry and immersion applications) for  most demanding applications
  • Semiconductor processing
EUV resist: ES Series photoresists for next-generation applications
  • Semiconductor processing

Product line

GradesInternal RefPackagingApplication
I-line resist: PFI / PXi  Series photoresists for all critical and non-critical applications
Semiconductor processing
KrF resist: PEK Series photoresists for all critical and non-critical applications
Semiconductor processing
ArF resist: PAR Series photoresists (both dry and immersion applications) for  most demanding applications
Semiconductor processing
EUV resist: ES Series photoresists for next-generation applications
Semiconductor processing

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SUMIRESIST™ Photoresists

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